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Product Catalog for Electronics Manufacturing Electronic Materials 3M™ Specialty Gases 3M™ Specialty Gas PFG-3480  Printer-friendly format 3M™ Specialty Gas PFG-3480, 17.1 gal cylinder (134 lb, 61 kg) PFG-3480 gas (C4F8O) dramatically lowers PFC emissions in CVD chamber cleaning, offering both economic and environmental advantages. 3M Id : 98-0212-2895-6

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