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Product Catalog for Electronics Manufacturing Electronic Materials 3M™ Specialty Gases 3M™ Specialty Gas PFG-3218 PFG-3218 gas (C3F8) lowers gas useage and PFC emissions in CVD chamber cleaning while maintaining a level of cleaning performance comparable to C2F6. Make a Selection 3M™ Specialty Gas PFG-3218, 1.4 gal cylinder (10 lb, 4.5 kg) PFG-3218 gas (C3F8) lowers gas useage and PFC emissions in CVD chamber cleaning while maintaining a level of cleaning performance comparable to C2F6. 3M™ Specialty Gas PFG-3218, 120 gal cylinder (940 lb, 427 kg) PFG-3218 gas (C3F8) lowers gas useage and PFC emissions in CVD chamber cleaning while maintaining a level of cleaning performance comparable to C2F6.

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